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Faculté des Sciences appliquées
Faculté des Sciences appliquées
MASTER THESIS
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Photonic properties of periodic arrays of nanometer-wide metal lines

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Elias, Quentin ULiège
Promotor(s) : Vanderheyden, Benoît ULiège
Date of defense : 7-Sep-2020/9-Sep-2020 • Permalink : http://hdl.handle.net/2268.2/10788
Details
Title : Photonic properties of periodic arrays of nanometer-wide metal lines
Translated title : [fr] Propriétés photoniques de résaux périodiques constitués de fils métalliques nanométriques
Author : Elias, Quentin ULiège
Date of defense  : 7-Sep-2020/9-Sep-2020
Advisor(s) : Vanderheyden, Benoît ULiège
Committee's member(s) : Bogdanowicz, Janusz 
Nguyen, Ngoc Duy ULiège
Redouté, Jean-Michel ULiège
Language : English
Number of pages : 166
Keywords : [en] reflectance
[en] transmittance
[en] array
[en] periodic
[en] metal
[en] copper
[en] interconnect
[en] metrology
[en] geometry
[en] pitch
[en] width
[en] height
[en] perfect electric conductor
[en] pec
[en] band structure
[en] waveguide
[en] diffraction
[en] grating
[en] plasmonic
[en] surface
[en] plasmon
[en] polariton
[en] semiconductor
[en] oxide
[en] scatterometry
[en] raman
[en] moore
[en] ruthenium
[en] platinum
[en] thin-film
[en] extraordinay
[en] optical
[en] transmission
[en] cutoff
[en] mode
[en] dispersion
[en] relation
[en] propagation
[en] evanescent
[en] nanometer
[en] photonic
Discipline(s) : Physical, chemical, mathematical & earth Sciences > Physics
Research unit : IMEC
Target public : Researchers
Professionals of domain
Student
Institution(s) : Université de Liège, Liège, Belgique
Degree: Master en ingénieur civil physicien, à finalité approfondie
Faculty: Master thesis of the Faculté des Sciences appliquées

Abstract

[en] In this master thesis, the interaction of light with periodic arrays of nanometer-wide metal lines arestudied. To do so, extensive use of wave optics, waveguide and diffraction grating theories is made to better understand the interaction of light with a structure made of perfect electrical conductor (PEC) lines, both for TE and TM polarizations. In particular, we propose to gather the results of those theories in an original band structure to understand how light can couple into the array as a function of the geometrical parameters. The structure is viewed as periodic metallic waveguides simultaneously constituting a diffraction grating. The model is used to analyze quantitative numerical finite element calculations of reflectance and transmittance spectra (obtained using COMSOL Multiphysics). First, a grating of PEC lines is studied. Then an array of copper lines is analyzed and compared to the PEC lines.


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Author

  • Elias, Quentin ULiège Université de Liège > Master ingé. civ. phys., à fin.

Promotor(s)

Committee's member(s)

  • Bogdanowicz, Janusz
  • Nguyen, Ngoc Duy ULiège Université de Liège - ULiège > Département de physique > Physique des solides, interfaces et nanostructures
    ORBi View his publications on ORBi
  • Redouté, Jean-Michel ULiège Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
    ORBi View his publications on ORBi
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  • Total number of downloads 157










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